MEMS and Biomedical Devices MEMS Inlet Valve for Portable Sensor Systems

MEMS Inlet Valve for Portable Sensor Systems With funding support from DARPA, RTI developed the electrostatic “artificial eyelid” actuator, which has a diversity of applications including optical shutters, electrical switches, tunable capacitors, and microvalves. The artificial eyelid consists of a flexible curled film fabricated from polymer and metal layers which is anchored to a substrate (e.g., silicon, quartz). The device operates electrostatically causing the curled film to flatten across the substrate with operating frequencies as high as 5–10 kHz. Microvalves have been fabricated by combining the flexible film actuator with a substrate containing orifices for gas flow. In collaboration with a commercial partner, RTI demonstrated a low-power 15 psi valve, optimized as an inlet for battery-operated portable sensor devices and medical instrumentation.